阴极真空弧离子源的研制

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阴极真空弧离子源的研制

张孝吉, 张荟星, 周凤生, 吴先映, 李强, 刘风华

文章导航 > 原子核物理评论 > 1997 > 14(3): 164-166

张孝吉, 张荟星, 周凤生, 吴先映, 李强, 刘风华. 阴极真空弧离子源的研制[J]. 原子核物理评论, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164

引用本文:

张孝吉, 张荟星, 周凤生, 吴先映, 李强, 刘风华. 阴极真空弧离子源的研制[J]. 原子核物理评论, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164

ZHANG Xiao-ji, ZHANG Hui-xing, ZHOU Feng-sheng, WU Xian-ying, LI Qiang, LIU Feng-hua. Development of Cathode Vacuum Arc Ion Source[J]. Nuclear Physics Review, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164

Citation:

ZHANG Xiao-ji, ZHANG Hui-xing, ZHOU Feng-sheng, WU Xian-ying, LI Qiang, LIU Feng-hua. Development of Cathode Vacuum Arc Ion Source[J]. Nuclear Physics Review, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164

阴极真空弧离子源的研制

doi: 10.11804/NuclPhysRev.14.03.164

北京师范大学低能核物理所; 北京市辐射中心

Development of Cathode Vacuum Arc Ion Source

(Institute of Low Energy Nuclear Physics; Beijing Normal University; Beijing Radiation Center; Beijing 100875);

摘要: 为发展金属离子束材料表面改性技术的工业应用，北师大低能核物理所研制成阴极真空弧离子源和离子注入装置．简要介绍该设备的结构、原理和性能． The cathode vacuum arc ion source and ion implantation facility have been developed in our institute for industrial application of surface modification of materials. In this paper the principle structure and performance of these facilities were described.
- 真空弧放电 /
- MEVVA离子源 /
- 离子注入 /
- 表面改性
Abstract: The cathode vacuum arc ion source and ion implantation facility have been developed in our institute for industrial application of surface modification of materials. In this paper the principle structure and performance of these facilities were described.
- cathode vacuum /
- MEVVA ion source /
- ion implantation /
- surface modification

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阴极真空弧离子源的研制

doi: 10.11804/NuclPhysRev.14.03.164

北京师范大学低能核物理所; 北京市辐射中心

收稿日期: 1900-01-01
修回日期: 1900-01-01
刊出日期: 1997-09-20

关键词:

真空弧放电 /

MEVVA离子源 /

摘要: 为发展金属离子束材料表面改性技术的工业应用，北师大低能核物理所研制成阴极真空弧离子源和离子注入装置．简要介绍该设备的结构、原理和性能． The cathode vacuum arc ion source and ion implantation facility have been developed in our institute for industrial application of surface modification of materials. In this paper the principle structure and performance of these facilities were described.

English Abstract

张孝吉, 张荟星, 周凤生, 吴先映, 李强, 刘风华. 阴极真空弧离子源的研制[J]. 原子核物理评论, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164

引用本文:

张孝吉, 张荟星, 周凤生, 吴先映, 李强, 刘风华. 阴极真空弧离子源的研制[J]. 原子核物理评论, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164

ZHANG Xiao-ji, ZHANG Hui-xing, ZHOU Feng-sheng, WU Xian-ying, LI Qiang, LIU Feng-hua. Development of Cathode Vacuum Arc Ion Source[J]. Nuclear Physics Review, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164

Citation:

ZHANG Xiao-ji, ZHANG Hui-xing, ZHOU Feng-sheng, WU Xian-ying, LI Qiang, LIU Feng-hua. Development of Cathode Vacuum Arc Ion Source[J]. Nuclear Physics Review, 1997, 14(3): 164-166. doi: 10.11804/NuclPhysRev.14.03.164

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