Ion Beam Applications on a 100keV EMIS and Ion Implanter

Chen Miao; Zou Zhi-yi; Huang Jian-ming; Ye Bo-nian; Qian Wen-guo; Li Qin-wen

doi:10.11804/NuclPhysRev.10.04.039

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Article Navigation > Nuclear Physics Review > 1993 > 10(4): 39-42

Chen Miao, Zou Zhi-yi, Huang Jian-ming, Ye Bo-nian, Qian Wen-guo, Li Qin-wen. Ion Beam Applications on a 100keV EMIS and Ion Implanter[J]. Nuclear Physics Review, 1993, 10(4): 39-42. doi: 10.11804/NuclPhysRev.10.04.039

Citation:

Chen Miao, Zou Zhi-yi, Huang Jian-ming, Ye Bo-nian, Qian Wen-guo, Li Qin-wen. Ion Beam Applications on a 100keV EMIS and Ion Implanter[J]. Nuclear Physics Review, 1993, 10(4): 39-42. doi: 10.11804/NuclPhysRev.10.04.039

Ion Beam Applications on a 100keV EMIS and Ion Implanter

doi: 10.11804/NuclPhysRev.10.04.039

Shanghai Institute of Nuclear Research, Academia Sinica, Shanghai 201800

Received Date: 1900-01-01
Rev Recd Date: 1900-01-01
Publish Date: 1993-12-20

Abstract

A versatile low energy ion facility and its main specifications are described. Some newion beam applications and experimental results are given.
- isotope separation,
- ion implantation,
- material modification,
- ⁵⁷Fe,
- C₆₀
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通讯作者: 陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

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