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Article Navigation >  Nuclear Physics Review  > 1998  >  15(1): 43-49

ZHENG Li-ping. Isotope Puzzle in Sputtering[J]. Nuclear Physics Review, 1998, 15(1): 43-49. doi: 10.11804/NuclPhysRev.15.01.043
Citation: ZHENG Li-ping. Isotope Puzzle in Sputtering[J]. Nuclear Physics Review, 1998, 15(1): 43-49. doi: 10.11804/NuclPhysRev.15.01.043
shu

Isotope Puzzle in Sputtering

doi: 10.11804/NuclPhysRev.15.01.043

  • (Shanghai Institute of Nuclear Research; the Chinese Academy of Sciences; Shanghai 201800);

  • Received Date: 1900-01-01
  • Rev Recd Date: 1900-01-01
  • Publish Date: 1998-03-20
  • Mechanisms affecting multicomponent material sputtering are complex. Isotope sputtering is the simplest in the multicomponent materials sputtering. Although only mass effect plays a dominant role in the isotope sputtering, there is still an isotope puzzle in suputtering by ion bombardment. The major arguments are as follows:(1) At the zero fluence, is the isotope enrichment ejectionangleindependent or ejectionangledependent? (2)Is the isotope angular effect the primary or the ...
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Isotope Puzzle in Sputtering

doi: 10.11804/NuclPhysRev.15.01.043
  • (Shanghai Institute of Nuclear Research; the Chinese Academy of Sciences; Shanghai 201800);
  • Received Date: 1900-01-01
  • Rev Recd Date: 1900-01-01
  • Publish Date: 1998-03-20

Abstract:  Mechanisms affecting multicomponent material sputtering are complex. Isotope sputtering is the simplest in the multicomponent materials sputtering. Although only mass effect plays a dominant role in the isotope sputtering, there is still an isotope puzzle in suputtering by ion bombardment. The major arguments are as follows:(1) At the zero fluence, is the isotope enrichment ejectionangleindependent or ejectionangledependent? (2)Is the isotope angular effect the primary or the ...

ZHENG Li-ping. Isotope Puzzle in Sputtering[J]. Nuclear Physics Review, 1998, 15(1): 43-49. doi: 10.11804/NuclPhysRev.15.01.043
Citation: ZHENG Li-ping. Isotope Puzzle in Sputtering[J]. Nuclear Physics Review, 1998, 15(1): 43-49. doi: 10.11804/NuclPhysRev.15.01.043
shu

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