High Resolution Surface Analysis with Elastic Recoil Detection

LU Xiu-qin; FU Chang-bo; GUO Ji-yu; ZHAO Kui; LIANG Gang; LI Shu-yuan; LIU Jian-cheng; JIANG Hua

doi:10.11804/NuclPhysRev.17.04.228

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Article Navigation > Nuclear Physics Review > 2000 > 17(4): 228-230

LU Xiu-qin, FU Chang-bo, GUO Ji-yu, ZHAO Kui, LIANG Gang, LI Shu-yuan, LIU Jian-cheng, JIANG Hua. High Resolution Surface Analysis with Elastic Recoil Detection[J]. Nuclear Physics Review, 2000, 17(4): 228-230. doi: 10.11804/NuclPhysRev.17.04.228

Citation:

LU Xiu-qin, FU Chang-bo, GUO Ji-yu, ZHAO Kui, LIANG Gang, LI Shu-yuan, LIU Jian-cheng, JIANG Hua. High Resolution Surface Analysis with Elastic Recoil Detection[J]. Nuclear Physics Review, 2000, 17(4): 228-230. doi: 10.11804/NuclPhysRev.17.04.228

High Resolution Surface Analysis with Elastic Recoil Detection

doi: 10.11804/NuclPhysRev.17.04.228

(Department of Nuclear Physics; China Institute of Atomic Energy; Beijing 102413; China);

Received Date: 1900-01-01
Rev Recd Date: 1900-01-01
Publish Date: 2000-12-20

Abstract

High resolution depth profiling technique with elastic recoil detection analysis has been developed at the HI 13 tandem accelerator of CIAE. A depth resolution of 1.2 nm was achieved at the surface of the samples with the Q3D magnetic spectrometer and the focal plane detector. From light to medium heavy elements were simultaneous analyzed with a small Δ E E telescope. The method was applied to depth profile analysis of C/LiF multilayers, La 2SrCuO 4 superconductor and GaN foil samples.
- elastic recoil detection,
- depth resolution,
- Q3D magnetic spectromet
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通讯作者: 陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

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