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LI Gong-ping, ZHANG Xiao-dong, LIU Zheng-min. Non-Rutherford Elastic Scattering Cross Sections for 160° Backscattering of 1.30-2.21 MeV Protons on Silicon[J]. Nuclear Physics Review, 2002, 19(1): 39-41. doi: 10.11804/NuclPhysRev.19.01.039
Citation: LI Gong-ping, ZHANG Xiao-dong, LIU Zheng-min. Non-Rutherford Elastic Scattering Cross Sections for 160° Backscattering of 1.30-2.21 MeV Protons on Silicon[J]. Nuclear Physics Review, 2002, 19(1): 39-41. doi: 10.11804/NuclPhysRev.19.01.039

Non-Rutherford Elastic Scattering Cross Sections for 160° Backscattering of 1.30-2.21 MeV Protons on Silicon

doi: 10.11804/NuclPhysRev.19.01.039
  • Received Date: 1900-01-01
  • Rev Recd Date: 1900-01-01
  • Publish Date: 2002-03-20
  • The elastic backscattering cross sections of H + from silicon for a wide energy range are very useful parameters in the proton backscattering analysis for investigating silicon content and distribution profiles in the films. It is necessary to measure the scattering cross sections with good accuracy at a large scattering angle for the applications of proton backscattering analysis. The present paper reports our measured results of differential elastic backscattering cross sections of 1.30-2.21 MeV...
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Non-Rutherford Elastic Scattering Cross Sections for 160° Backscattering of 1.30-2.21 MeV Protons on Silicon

doi: 10.11804/NuclPhysRev.19.01.039

Abstract:  The elastic backscattering cross sections of H + from silicon for a wide energy range are very useful parameters in the proton backscattering analysis for investigating silicon content and distribution profiles in the films. It is necessary to measure the scattering cross sections with good accuracy at a large scattering angle for the applications of proton backscattering analysis. The present paper reports our measured results of differential elastic backscattering cross sections of 1.30-2.21 MeV...

LI Gong-ping, ZHANG Xiao-dong, LIU Zheng-min. Non-Rutherford Elastic Scattering Cross Sections for 160° Backscattering of 1.30-2.21 MeV Protons on Silicon[J]. Nuclear Physics Review, 2002, 19(1): 39-41. doi: 10.11804/NuclPhysRev.19.01.039
Citation: LI Gong-ping, ZHANG Xiao-dong, LIU Zheng-min. Non-Rutherford Elastic Scattering Cross Sections for 160° Backscattering of 1.30-2.21 MeV Protons on Silicon[J]. Nuclear Physics Review, 2002, 19(1): 39-41. doi: 10.11804/NuclPhysRev.19.01.039

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