Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering

ZHENG Li-ping

doi:10.11804/NuclPhysRev.20.01.061

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Article Navigation > Nuclear Physics Review > 2003 > 20(1): 61-65

ZHENG Li-ping. Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering[J]. Nuclear Physics Review, 2003, 20(1): 61-65. doi: 10.11804/NuclPhysRev.20.01.061

Citation:

ZHENG Li-ping. Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering[J]. Nuclear Physics Review, 2003, 20(1): 61-65. doi: 10.11804/NuclPhysRev.20.01.061

Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering

doi: 10.11804/NuclPhysRev.20.01.061

ZHENG Li-ping

(Shanghai Institute of Nuclear Research; Chinese Academy of Sciences; Shanghai 201800; China; International Centre for Material Physics; Shenyang 110016; China);

Received Date: 1900-01-01
Rev Recd Date: 1900-01-01
Publish Date: 2003-03-20

Abstract

In 1982, phenomena of bombardmentinduced Gibssian segregation(BIGS) during alloy sputtering were found at low temperature. By using Monte Carlo(MC) simulation programs including mass effect, surface binding energy effect and bombardmentinduced Gibssian segregation effect, we especially study two important characters of BIGS (one is the character of the surface composition gradient of BIGS, and another is the intermediate character of the surface composition gradient of BIGS). The MC simulations give...
- alloy sputtering,
- bombardment-induced Gibbsian segregation,
- Monte Carlo simulation
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通讯作者: 陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

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