Preparation and Characterization of ZnO Films by Modified SILAR Method

ZHANG Ling; LIU Jie; HOU Ming-dong; SUN You-mei; DUAN Jin-lai; YAO Hui-jun; MO Dan; CHEN Yan-feng

doi:10.11804/NuclPhysRev.26.02.154

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Article Navigation > Nuclear Physics Review > 2009 > 26(2): 154-157

ZHANG Ling, LIU Jie, HOU Ming-dong, SUN You-mei, DUAN Jin-lai, YAO Hui-jun, MO Dan, CHEN Yan-feng. Preparation and Characterization of ZnO Films by Modified SILAR Method[J]. Nuclear Physics Review, 2009, 26(2): 154-157. doi: 10.11804/NuclPhysRev.26.02.154

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ZHANG Ling, LIU Jie, HOU Ming-dong, SUN You-mei, DUAN Jin-lai, YAO Hui-jun, MO Dan, CHEN Yan-feng. Preparation and Characterization of ZnO Films by Modified SILAR Method[J]. Nuclear Physics Review, 2009, 26(2): 154-157. doi: 10.11804/NuclPhysRev.26.02.154

Preparation and Characterization of ZnO Films by Modified SILAR Method

doi: 10.11804/NuclPhysRev.26.02.154

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Corresponding author: ZHANG Ling
Received Date: 1900-01-01
Rev Recd Date: 1900-01-01
Publish Date: 2009-06-20

Abstract

A modified solution method，successive ionic layer adsorption and reaction(SILAR)，was applied to prepare transparent zinc oxide(ZnO) film on glass substrate at (125±5) ℃ in mixed ion precursor solution. The surface morphology and crystallizations of films were analyzed by field emission scanning microscopy(FESEM) and Xray diffraction(XRD)， respectively. The optical properties of the films were studied by ultraviolet visible(UVVis)spectroscopy. The results show that the obtained samples are polycrystalline films of hexagonal wurtzite structure，with the preference of [002\] orientation. The asdeposited films exhibit uniform and compact surface morphology， with the film thickness of 550 nm， and have high transmittance in the visible band(＞80％).
- SILAR method,
- zinc oxide,
- thin film,
- characterization
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通讯作者: 陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

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Preparation and Characterization of ZnO Films by Modified SILAR Method

doi: 10.11804/NuclPhysRev.26.02.154

Corresponding author: ZHANG Ling

Received Date: 1900-01-01
Rev Recd Date: 1900-01-01
Publish Date: 2009-06-20

Key words:

Abstract: A modified solution method，successive ionic layer adsorption and reaction(SILAR)，was applied to prepare transparent zinc oxide(ZnO) film on glass substrate at (125±5) ℃ in mixed ion precursor solution. The surface morphology and crystallizations of films were analyzed by field emission scanning microscopy(FESEM) and Xray diffraction(XRD)， respectively. The optical properties of the films were studied by ultraviolet visible(UVVis)spectroscopy. The results show that the obtained samples are polycrystalline films of hexagonal wurtzite structure，with the preference of [002\] orientation. The asdeposited films exhibit uniform and compact surface morphology， with the film thickness of 550 nm， and have high transmittance in the visible band(＞80％).

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