Swelling Phenomenon and Eatching Property of Rutile TiO2 Irradiated by Swift Heavy Ions
doi: 10.11804/NuclPhysRev.28.03.326
- Received Date: 1900-01-01
- Rev Recd Date: 1900-01-01
- Publish Date: 2011-09-20
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Key words:
- TiO2 /
- swelling /
- chemical etching /
- electronic stopping power
Abstract: There appears volume swelling on the surface of the irradiated rutile TiO2 crystal and the volume swelling is affected by the ion fluence and the electronic stopping power. To induce adequate irradiation damage for the chemical etching, the irradiation parameters must fulfill some requirement. There is minimum electronic stopping power for the chemical etching of the irradiated region in TiO2 crystal, which is about 8. 2 keV/nm. If the ion fluence is below 1×1013ions/cm2, the saturated etching depth of the irradiated region in TiO2crystal cannot be reached. The irradiation damage based on latent track formation frame and the theoretical linkage to the etching technique is investigated. It is hopeful to fabricate microand nanoscale structurce in rutile TiO2 crystal by using the ion irradiation and chemical etching technique.
Citation: | LUO Jie, SUN You-mei, #, HOU Ming-dong, DUAN Jing-lai, CHANG Hai-long, LIU Jie. Swelling Phenomenon and Eatching Property of Rutile TiO2 Irradiated by Swift Heavy Ions[J]. Nuclear Physics Review, 2011, 28(3): 326-331. doi: 10.11804/NuclPhysRev.28.03.326 |