Techniques and Multidisciplinary Applications of Ion Microbeam

Key words: 
• microbeam /
• microprobe /
• ion beam analysis /
• single event effect /
• proton beam writing /
• targeted cell irradiation

Abstract: 
Beam of MeV ions from particle accelerators can be confined by collimators or focused by electrical/magnetic quadruples into micrometer size， and this microbeam can be used to obtain spatial information or radiation effect in solids and biological samples. This paper reviews the technical developments and the multidisciplinary applications of microbeam， including ion beam analysis， single event effect in semiconductor devices， proton beam writing and cellular response to targeted particle irradiations. Finally， the high energy heavy ion microbeam facility at the Institute of Modern Physics of Chinese Academy of Sciences is introduced， which has successfully focused 1 GeV Carbon ions into a beam spot of 1 μm×2 μm in air.