Microwave Impedance Matching of A 2.45 GHz ECR Ion Source

QIAN Cheng; CHEN Zhi; WU Qi; ZHANG Wen-hui; WANG Yun; YANG Yao; MA Hong-yi; FANG Xing; SUN Liang-ting; ZHANG Xue-zhen; ZHANG Zi-min; LIU Zhan-wen; ZHAO Hong-wei

doi:10.11804/NuclPhysRev.30.01.032

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Article Navigation > Nuclear Physics Review > 2013 > 30(1): 32-37

QIAN Cheng, CHEN Zhi, WU Qi, ZHANG Wen-hui, WANG Yun, YANG Yao, MA Hong-yi, FANG Xing, SUN Liang-ting, ZHANG Xue-zhen, ZHANG Zi-min, LIU Zhan-wen, ZHAO Hong-wei. Microwave Impedance Matching of A 2.45 GHz ECR Ion Source[J]. Nuclear Physics Review, 2013, 30(1): 32-37. doi: 10.11804/NuclPhysRev.30.01.032

Citation:

QIAN Cheng, CHEN Zhi, WU Qi, ZHANG Wen-hui, WANG Yun, YANG Yao, MA Hong-yi, FANG Xing, SUN Liang-ting, ZHANG Xue-zhen, ZHANG Zi-min, LIU Zhan-wen, ZHAO Hong-wei. Microwave Impedance Matching of A 2.45 GHz ECR Ion Source[J]. Nuclear Physics Review, 2013, 30(1): 32-37. doi: 10.11804/NuclPhysRev.30.01.032

Microwave Impedance Matching of A 2.45 GHz ECR Ion Source

doi: 10.11804/NuclPhysRev.30.01.032

School of Nuclear Science and Technology,University of Science and Technology of China,Hefei 230026, China;
Institute of Modern Physics,Chinese Academy of Sciences, Lanzhou 730000, China;

Received Date: 1900-01-01
Rev Recd Date: 1900-01-01
Publish Date: 2013-03-20

Abstract

Plasma impedance of an ECR ion source is important for microwave transmission and impedance matching design. Plasma impedance was measured indirectly with the 2.45 GHz ECR proton source at the Institute of Modern Physics, Chinese Academy of Sciences. In the test, we got microwave window mpedance by using water absorption load instead of plasma load, and the source plasma impedance was derived from the test data with the 2.45 GHz ECR proton source and microwave window impedance. The experimental results show that ridge waveguide output impedance and the subsequent load does not exactly match, plasma impedance variation is nonlinear with microwave power. The achieved
result is useful in the design of ridged waveguide and microwave window.
- ECR ion source,
- plasma impedance,
- ridged waveguide,
- impedance matching
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通讯作者: 陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

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Microwave Impedance Matching of A 2.45 GHz ECR Ion Source

doi: 10.11804/NuclPhysRev.30.01.032

School of Nuclear Science and Technology,University of Science and Technology of China,Hefei 230026, China;

Institute of Modern Physics,Chinese Academy of Sciences, Lanzhou 730000, China;

Received Date: 1900-01-01
Rev Recd Date: 1900-01-01
Publish Date: 2013-03-20

Key words:

Abstract: Plasma impedance of an ECR ion source is important for microwave transmission and impedance matching design. Plasma impedance was measured indirectly with the 2.45 GHz ECR proton source at the Institute of Modern Physics, Chinese Academy of Sciences. In the test, we got microwave window mpedance by using water absorption load instead of plasma load, and the source plasma impedance was derived from the test data with the 2.45 GHz ECR proton source and microwave window impedance. The experimental results show that ridge waveguide output impedance and the subsequent load does not exactly match, plasma impedance variation is nonlinear with microwave power. The achieved
result is useful in the design of ridged waveguide and microwave window.

Citation:

QIAN Cheng, CHEN Zhi, WU Qi, ZHANG Wen-hui, WANG Yun, YANG Yao, MA Hong-yi, FANG Xing, SUN Liang-ting, ZHANG Xue-zhen, ZHANG Zi-min, LIU Zhan-wen, ZHAO Hong-wei. Microwave Impedance Matching of A 2.45 GHz ECR Ion Source[J]. Nuclear Physics Review, 2013, 30(1): 32-37. doi: 10.11804/NuclPhysRev.30.01.032