Advanced Search
Volume 32 Issue 2
Jun.  2015
Turn off MathJax
Article Contents
Article Navigation >  Nuclear Physics Review  > 2015  >  32(2): 242-248

ZHOU Xiaodong. Fabrication of TiO2 Nano lms by Ti+ Ion Implantation and Subsequent Thermal Annealing[J]. Nuclear Physics Review, 2015, 32(2): 242-248. doi: 10.11804/NuclPhysRev.32.02.242
Citation: ZHOU Xiaodong. Fabrication of TiO2 Nano lms by Ti+ Ion Implantation and Subsequent Thermal Annealing[J]. Nuclear Physics Review, 2015, 32(2): 242-248. doi: 10.11804/NuclPhysRev.32.02.242
shu

Fabrication of TiO2 Nano lms by Ti+ Ion Implantation and Subsequent Thermal Annealing

doi: 10.11804/NuclPhysRev.32.02.242

  • School of Physics and Electromechnical Engineering, Zhoukou Normal University, Zhoukou 466001, Henan, China

  • Received Date: 1900-01-01
  • Rev Recd Date: 1900-01-01
  • Publish Date: 2015-06-20
  • TiO2 nanofilms on the surface of fused silica have been fabricated by Ti+ ion implantation and subsequent thermal annealing in oxygen ambience. The silica glasses were implanted by Ti+ ions at 20 kV with fluences of 1.5 and 3x1017 ions/cm2 using a metal vapor vacuum arc (MEVVA) ion source implanter. The optical absorption spectroscopy, Raman scattering spectroscopy, X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and transmission electron microscopy (TEM) measurements were done to figure out formation mechanism of the TiO2 nanofilms. The formation of TiO2 nanofilms resulted from outdiffusion of the implanted Ti ions to the substrate surface, where they were oxidized intoTiO2. The formation,grain size and the crystallographic phase of TiO2 are annealing temperature dependent, and TiO2 nanofilm thickness can be well tailored by controlling the implantation fluence and annealing time. Results show that the TiO2 nanofilms fabricated by this novel method have great potential in applications such as photocatalytic,antibacterial and self-cleaning glass.
  • 加载中
通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

  1. 本站搜索
  2. 百度学术搜索
  3. 万方数据库搜索
  4. CNKI搜索
Get Citation
PDF
XML

Article Metrics

Article views(1424) PDF downloads(570) Cited by()

Proportional views

Fabrication of TiO2 Nano lms by Ti+ Ion Implantation and Subsequent Thermal Annealing

doi: 10.11804/NuclPhysRev.32.02.242
  • School of Physics and Electromechnical Engineering, Zhoukou Normal University, Zhoukou 466001, Henan, China
  • Received Date: 1900-01-01
  • Rev Recd Date: 1900-01-01
  • Publish Date: 2015-06-20

Abstract: TiO2 nanofilms on the surface of fused silica have been fabricated by Ti+ ion implantation and subsequent thermal annealing in oxygen ambience. The silica glasses were implanted by Ti+ ions at 20 kV with fluences of 1.5 and 3x1017 ions/cm2 using a metal vapor vacuum arc (MEVVA) ion source implanter. The optical absorption spectroscopy, Raman scattering spectroscopy, X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and transmission electron microscopy (TEM) measurements were done to figure out formation mechanism of the TiO2 nanofilms. The formation of TiO2 nanofilms resulted from outdiffusion of the implanted Ti ions to the substrate surface, where they were oxidized intoTiO2. The formation,grain size and the crystallographic phase of TiO2 are annealing temperature dependent, and TiO2 nanofilm thickness can be well tailored by controlling the implantation fluence and annealing time. Results show that the TiO2 nanofilms fabricated by this novel method have great potential in applications such as photocatalytic,antibacterial and self-cleaning glass.

ZHOU Xiaodong. Fabrication of TiO2 Nano lms by Ti+ Ion Implantation and Subsequent Thermal Annealing[J]. Nuclear Physics Review, 2015, 32(2): 242-248. doi: 10.11804/NuclPhysRev.32.02.242
Citation: ZHOU Xiaodong. Fabrication of TiO2 Nano lms by Ti+ Ion Implantation and Subsequent Thermal Annealing[J]. Nuclear Physics Review, 2015, 32(2): 242-248. doi: 10.11804/NuclPhysRev.32.02.242
shu

    HTML

Catalog

    Copyright by 《Nuclear Physics Review》Editorial Office

    Address: 509 Nanchang Road, LanzhouPostCode: 730000Tel: 0931-4969374, 4969371Fax: 0931-8272100E-mail:npr@impcas.ac.cn

    陇ICP备2023003351号-2 甘公网安备 62010202000723号

    Supported by: Beijing Renhe Information Technology Co. Ltd  

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return