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Volume 32 Issue S1
Nov.  2015
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LI Jinhai, A. A. Rossi, V. Palmieri. Magnetron Sputtering and Multilayer Deposition of Nb3Sn  Superconducting Thin Film[J]. Nuclear Physics Review, 2015, 32(S1): 59-63. doi: 10.11804/NuclPhysRev.32.S1.59
Citation: LI Jinhai, A. A. Rossi, V. Palmieri. Magnetron Sputtering and Multilayer Deposition of Nb3Sn  Superconducting Thin Film[J]. Nuclear Physics Review, 2015, 32(S1): 59-63. doi: 10.11804/NuclPhysRev.32.S1.59
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Magnetron Sputtering and Multilayer Deposition of Nb3Sn  Superconducting Thin Film

doi: 10.11804/NuclPhysRev.32.S1.59
  • 1.

    China Institute of Atomic Energy, Beijing 102413, China;

  • 2.

    INFN, Laboratori Nazionali di Legnaro, Legnaro (Padova) 2-35020, Italy

  • Publish Date: 2015-11-20
  • Nb3Sn is a very good kind of superconducting material. We rst sputtered the Nb and Sn with two magnetrons and deposited multilayer, and then obtained the superconducting thin lm by annealing. By this method, it is convenience to change the stoichiometric ratio and to investigate the property of Nb3Sn. We
    measured the superconducting parameters of the thin lm. The critical temperature is about 17 K and the residual resistance radio (RRR) is about 5. The method is needed to improve and increase the RRR, in order that the multilayer deposition can be used in the superconducting cavity fabrication.
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Magnetron Sputtering and Multilayer Deposition of Nb3Sn  Superconducting Thin Film

doi: 10.11804/NuclPhysRev.32.S1.59
  • 1. China Institute of Atomic Energy, Beijing 102413, China;
  • 2. INFN, Laboratori Nazionali di Legnaro, Legnaro (Padova) 2-35020, Italy
  • Publish Date: 2015-11-20

Abstract: Nb3Sn is a very good kind of superconducting material. We rst sputtered the Nb and Sn with two magnetrons and deposited multilayer, and then obtained the superconducting thin lm by annealing. By this method, it is convenience to change the stoichiometric ratio and to investigate the property of Nb3Sn. We
measured the superconducting parameters of the thin lm. The critical temperature is about 17 K and the residual resistance radio (RRR) is about 5. The method is needed to improve and increase the RRR, in order that the multilayer deposition can be used in the superconducting cavity fabrication.

LI Jinhai, A. A. Rossi, V. Palmieri. Magnetron Sputtering and Multilayer Deposition of Nb3Sn  Superconducting Thin Film[J]. Nuclear Physics Review, 2015, 32(S1): 59-63. doi: 10.11804/NuclPhysRev.32.S1.59
Citation: LI Jinhai, A. A. Rossi, V. Palmieri. Magnetron Sputtering and Multilayer Deposition of Nb3Sn  Superconducting Thin Film[J]. Nuclear Physics Review, 2015, 32(S1): 59-63. doi: 10.11804/NuclPhysRev.32.S1.59
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