关键词: 
核微探针 /
PIXE /
RBS /
STIM

摘要: 复旦大学现代物理研究所利用国家“211工程”的资助，从英国Oxford Microbeams公司引进了微探针关键部件，建立了新的核微探针实验装置.介绍了该装置各个组成部分,包括束线，靶室，聚集、扫描系统以及数据采集系统等.现已得到线度为μm量级的离子束.
A nuclear microprobe was set up at the Institute of Modern Physics of Fudan University.The key parts were imported from Oxford Microbeams Ltd.The hardware system of the microprobe,including beam line,target chamber,focusing system and DAQ system is introduced. About several micrometer could be achieved at present beam spot size.